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万博体育客户端最新版平移台PPX-50

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市场价
0.0
浏览量:
108
产品编号
PPX-50
台面尺寸:
50x50
行程:
28x28mm
最大载重:
3
分辨率:
1nm
重复定位精度:
±20nm
真空选项:
反馈:
数量
-
+
库存:
0
1
产品描述
[[[[产品参数, 参数]]]]

The PPX-50 is a low profile, long travel, integrated XY stage with an open aperture and a height of only 17.5 mm. Cross roller bearings guarantee smooth and stable motion for loads up to 30 N. It utilizes a multi-phase piezo motor resulting in high speed (>5mm/s) and high blocking force (> 2 N). The PPX-50 is available in open loop or with a linear encoder with a closed-loop esolution of 1 nm. Versions capable of operation in vacuum (10-9 mbar) are available. The PPX-50 is compatible with the MMC-100 and MMC-110 controllers.

Travel Dependent Specifications
Travel range [mm]
28x28
Straightness/Flatness [µm]
±3.5
Pitch [µrad]
±200
Yaw [µrad]
±100
Weight [g]
120
Motor Compatibility
Motor option
Piezo Motor
Speed, max [mm/s]
2 (MMC-100), 5 (MMC-110)
Motor/Feedback Dependent Specifcations
Encoder option
None(open Loop)
Analog(1 Vpp)
Digital
Resolution, typical [nm]
1
10
1
Repeatability, bi-directional [nm]
n/a
±50
±20
Repeatability, uni-directional [nm]
n/a
50
20
Accuracy [µm]
-
±1
±1

 

Load Characteristics
Fx [N]
Fy [N]
Fz [N]
Mx [N]
My [N]
Mz [N]
Load, max
2
2
30
0.6
0.6
0.6

 

Order no.: PPX-50-
DRIVE
 
 
 
 
 
 
Piezo Motor, PM-002
1
 
 
 
 
TRAVEL
 
 
 
 
 
 
28mm
 
1
 
 
 
ENCODER
 
 
 
 
 
 
None
 
 
0
 
 
 
Analog (1 Vpp)
 
 
2
 
 
 
Digital (RS-422)
 
 
3
 
 
LIMIT SWITCH
 
 
 
 
 
 
None
 
 
 
0
 
ENVIORNMENT
 
 
 
 
 
 
Atmospheric
 
 
 
 
0
 
High Vacuum, 10-6 mbar
 
 
 
 
6
 
Ultra High Vacuum, 10-9 mbar
 
 
 
 
9
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