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万博体育客户端最新版平移台PPS-110

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市场价
0.0
浏览量:
127
产品编号
PPS-110
台面尺寸:
110×110
行程:
100、200、300、500、1000mm
最大载重:
25
分辨率:
1nm
重复定位精度:
±20nm
真空选项:
反馈:
数量
-
+
库存:
0
1
产品描述
[[[[产品参数, 参数]]]]

The PPS-110 is a high-precision, long travel linear stage. It is available with piezo motor, linear motor, or ballscrew drives. Stainless steel recirculating ball bearings allow for smooth motion and high guiding accuracy for loads up to 25kg. Closed loop resolution of 2nm is achievable with a high precision digital encoder.

Travel Dependent Specifications
Travel range [mm]
100
200
300
500
1000
Straightness/Flatness [µm]
±3
±4
±5
±10
±15
Pitch [µrad]
±75
±100
±125
±200
±300
Yaw [µrad]
±75
±85
±100
±200
±300
Motor Compatibility
Motor option
Piezo Motor, PM-003
Speed, max [mm/s]
5 (MMC-110)
Motor/Feedback Dependent Specifcations
Encoder option
Open Loop
Digital (RS-422)
Resolution, typical [µm]
0.001
0.002
Repeatability, bi-directional [µm]
n/a
±0.02
Repeatability, uni-directional [µm]
n/a
0.02
Accuracy [µm]
n/a
±1

 

Load Characteristics
Orientation
Fx

 

[N]

Fy

 

[N]

Fz

 

[N]

Mx

 

[N·m]

My

 

[N·m]

Mz

 

[N·m]

kax

 

[µrad/N·m]

kay

 

[µrad/N·m]

Load, max
5
150
250
60
30
35
50
50
Order no.: PPS-110PM-
DRIVE
 
 
 
 
 
 
Piezo Motor PM-002
1
 
 
 
 
TRAVEL
 
 
 
 
 
 
100mm
 
1
 
 
 
 
200mm
 
2
 
 
 
 
300mm
 
3
 
 
 
 
500mm
 
4
 
 
 
 
1000mm
 
5
 
 
 
ENCODER
 
 
 
 
 
 
None (Open Loop)
 
 
0
 
 
 
Digital (RS-422)
 
 
3
 
 
LIMIT SWITCH
 
 
 
 
 
 
None
 
 
 
0
 
 
Mechanical
 
 
 
1
 
 
Optical
 
 
 
2
 
ENVIRONMENT
 
 
 
 
 
 
Atmospheric
 
 
 
 
0
 
High Vacuum, 10-6 mbar
 
 
 
 
6
 
Ultra High Vacuum, 10-9 mbar
 
 
 
 
9
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