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万博体育客户端最新版平移台PPS-28

零售价
0.0
市场价
0.0
浏览量:
235
产品编号
pps-28
台面尺寸:
28x28
行程:
26、51、76、102mm
最大载重:
5
分辨率:
1nm
重复定位精度:
±50nm
真空选项:
反馈:
数量
-
+
库存:
0
1
产品描述
[[[[产品参数, 参数]]]]

The PPS-28 is a high-precision, long travel linear piezo stage. Miniature crossed roller bearings assure high stiffness and guiding accuracy for loads up to 50 N (horizontal orientation). It utilizes our patent-pending multi-phase piezo motor resulting in high speed (> 2 mm/s) and high blocking force (> 2 N). The PPS-28 is available in open loop or with an external encoder. Closed-loop resolution of 2 nm is achievable. Versions capable of operation in vacuum (10-9 mbar) and/or cryo (4 Kelvin) are available. The PPS-28 is compatible with the MMC-100 and MMC-110 controllers.

Travel Dependent Specifications
Travel range [mm]
26
51
76
102
Straightness/Flatness [µm]
± 1.5
± 2.5
± 3
± 3.5
Pitch [µrad]
± 50
± 70
± 80
± 100
Yaw [µrad]
± 60
± 75
± 90
± 100
Weight [g]
63
125
165
206
Motor Compatibility
Motor option
Piezo Motor, PM-002
Speed, max [mm/s]
2 (MMC-100), 10 (MMC-110)
Motor/Feedback Dependent Specifcations
Encoder option
None (open loop)
Analog (1 Vpp)
Digital (RS-422)
Resolution, typical [nm]
1
10
1
Repeatability, bi-directional [nm]
n/a
± 50
± 50
Repeatability, uni-directional [nm]
n/a
50
50
Accuracy [µm]
-
± 1
± 1
Load Characteristics
Fx [N]
Fy [N]
Fz [N]
Mx [N·m]
My [N·m]
Mz [N·m]
Load, max
2
50
50
1
1
1
Order no.: PPS-28-
Drive
 
 
 
 
 
 
Piezo Motor, PM-002
1
 
 
 
 
Travel
 
 
 
 
 
 
26 mm
 
1
 
 
 
 
51 mm
 
3
 
 
 
 
76 mm
 
4
 
 
 
 
102 mm
 
5
 
 
 
Encoder
 
 
 
 
 
 
None (open loop)
 
 
0
 
 
 
Analog (1 Vpp)
 
 
2
 
 
 
Digital (RS-422)
 
 
3
 
 
Limit Switch
 
 
 
 
 
 
None
 
 
 
0
 
Environment
 
 
 
 
 
 
Atmospheric
 
 
 
 
0
 
High Vacuum, 10-6 mbar
 
 
 
 
6
 
Ultra High Vacuum, 10-9 mbar
 
 
 
 
9
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