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万博体育客户端最新版平移台PPX-32

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市场价
0.0
浏览量:
103
产品编号
PPX-32
台面尺寸:
32x32
行程:
18x18mm
最大载重:
1
分辨率:
1nm
重复定位精度:
±50nm
真空选项:
反馈:
数量
-
+
库存:
0
1
产品描述
[[[[产品参数, 参数]]]]

The PPX-32 is a low profile, long travel, integrated XY stage with a height of only 14 mm. Four pre-loaded ball slides guarantee smooth and stable motion for loads up to 10 N. It utilizes a multi-phase piezo motor resulting in high speed (> 2 mm/s) and high blocking force (> 1 N). The PPX-32 is available in open loop or with a linear encoder Closed-loop resolution of 1 nm is achievable. Versions capable of operation in vacuum (10-9  mbar) are available. The PPX-32 is compatible with the MMC-100 and MMC-110 controllers.

Travel Dependent Specifications
Travel range [mm]
18 x 18
Straightness/Flatness [µm]
± 2.5
Pitch [µrad]
± 200
Yaw [µrad]
± 100
Weight [g]
40
Motor Compatibility
Motor option
Piezo Motor, PM-002
Speed, max [mm/s]
2 (MMC-100), 5(MMC-110)
Motor/Feedback Dependent Specifcations
Encoder option
None (open loop)
Analog (1 Vpp)
Digital (RS-422)
Resolution, typical [nm]
1
10
1
Repeatability, bi-directional [nm]
n/a
± 50
± 50
Repeatability, uni-directional [nm]
n/a
50
50
Accuracy [µm]
-
± 1
± 1

 

Load Characteristics
Fx [N]
Fy [N]
Fz [N]
Mx [N·m]
My [N·m]
Mz [N·m]
Load, max
1
1
10
0.6
0.6
0.6
Order no.: PPX-32-
Drive
 
 
 
 
 
 
Piezo Motor, PM-002
1
 
 
 
 
Travel
 
 
 
 
 
 
18 x 18 mm
 
1
 
 
 
Encoder
 
 
 
 
 
 
None (open loop)
 
 
0
 
 
 
Analog (1 Vpp)
 
 
2
 
 
 
Digital (RS-422)
 
 
3
 
 
Limit Switch
 
 
 
 
 
 
None
 
 
 
0
 
Environment
 
 
 
 
 
 
Atmospheric
 
 
 
 
0
 
High Vacuum, 10-6 mbar
 
 
 
 
6
 
Ultra High Vacuum, 10-9 mbar
 
 
 
 
9
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